JPH0390445U - - Google Patents

Info

Publication number
JPH0390445U
JPH0390445U JP15235589U JP15235589U JPH0390445U JP H0390445 U JPH0390445 U JP H0390445U JP 15235589 U JP15235589 U JP 15235589U JP 15235589 U JP15235589 U JP 15235589U JP H0390445 U JPH0390445 U JP H0390445U
Authority
JP
Japan
Prior art keywords
holding groove
groove pitch
carrier
boat
pusher
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15235589U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0648851Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989152355U priority Critical patent/JPH0648851Y2/ja
Publication of JPH0390445U publication Critical patent/JPH0390445U/ja
Application granted granted Critical
Publication of JPH0648851Y2 publication Critical patent/JPH0648851Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1989152355U 1989-12-27 1989-12-27 ウェーハ立替機 Expired - Lifetime JPH0648851Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989152355U JPH0648851Y2 (ja) 1989-12-27 1989-12-27 ウェーハ立替機

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989152355U JPH0648851Y2 (ja) 1989-12-27 1989-12-27 ウェーハ立替機

Publications (2)

Publication Number Publication Date
JPH0390445U true JPH0390445U (en]) 1991-09-13
JPH0648851Y2 JPH0648851Y2 (ja) 1994-12-12

Family

ID=31698623

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989152355U Expired - Lifetime JPH0648851Y2 (ja) 1989-12-27 1989-12-27 ウェーハ立替機

Country Status (1)

Country Link
JP (1) JPH0648851Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6985341B2 (en) 2001-04-24 2006-01-10 Vlt, Inc. Components having actively controlled circuit elements
US7443229B1 (en) 2001-04-24 2008-10-28 Picor Corporation Active filtering

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61280630A (ja) * 1985-06-06 1986-12-11 Toshiba Corp 半導体ウエハ移送装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61280630A (ja) * 1985-06-06 1986-12-11 Toshiba Corp 半導体ウエハ移送装置

Also Published As

Publication number Publication date
JPH0648851Y2 (ja) 1994-12-12

Similar Documents

Publication Publication Date Title
JPH0247046U (en])
JPH0390445U (en])
JPH0332429U (en])
JPS6359332U (en])
JPS63144953U (en])
JPS59109147U (ja) ウエハ収納ケ−ス
JPS5991735U (ja) 半導体ウエ−ハ移し替え装置
JPS63188947U (en])
JPS6418726U (en])
JPS59107140U (ja) 半導体ウエ−ハ移送装置
JPS6325222U (en])
JPH0363937U (en])
JPS63177047U (en])
JPH01130536U (en])
JPS6219740U (en])
JPS6336048U (en])
JPH0184436U (en])
JPS61179748U (en])
JPS63137939U (en])
JPH0365248U (en])
JPS6316446U (en])
JPS5863751U (ja) シリコンウエハ−ス立て替え治具
JPS5998646U (ja) 半導体ウエハの製造工程に用いる指示管理表収納ケ−ス
JPS63142840U (en])
JPH01173942U (en])